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Intergas Products > Semiconductor Gases > Hydrogen Chloride
 HYDROGEN CHLORIDE
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HCl
UN 1050 |
DESCRIPTION: Hydrogen Chloride is a pungent, toxic, corrosive gas having a suffocating odour. It is heavier than air and fumes strongly in moist air.
TYPICAL APPLICATIONS:
Hydrogen Chloride is used for plasma and thermal etching of silicon and gallium arsenide water surfaces prior to epitaxial silicon and gallium arsenide growth. Hydrogen Chloride is also used as an additive to polysilicon etching. |
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Grade
Impurities |
Electronic
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VLSI |
Sigma 3 |
| (Gas Phase) |
99.995% (n4.5)
(Mol. PPM) |
99.999% (n5.0)
(Mol. PPM) |
99.999% (n5.0)
(Mol. PPM) |
| Nitrogen |
< 16 |
< 2 |
< 2 |
| Oxygen + Argon |
< 5 |
< 1 |
< 1 |
| THC |
< 54 |
< 1 |
< 1 |
| Carbon Dioxide |
< 10 |
< 8 |
< 5 |
| Moisture |
< 10 |
< 3 |
< 2 |
| CO |
-- |
-- |
< 1 |
| Total Metals |
-- |
< 10ppmw |
< 0.5 ppmw |
| Iron (Fe) |
-- |
-- |
< 0.1 ppmw |
| Nickel (Ni) |
-- |
-- |
< 0.05 ppmw |
| Chromium (Cr) |
-- |
-- |
< 0.05 ppmw |
| Other Metals¹ |
-- |
-- |
< 0.01 ppmw |
| ¹Other metals, include: Ca, Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn |
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| Cylinder Size |
Volume (kg) |
| B44st (A) |
27.3 |
| B50st |
37 |
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| INTERGAS can supply any internationally recognised valve type. For Hydrogen Chloride the standard international valve types are as follows: |
| American |
CGA 330 / DISS 634 |
| European |
DIN 477-8 |
| Recommended Equipment |
INTERGAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details. |
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| Gas Data |
| Mol. Weight |
36.461 |
| Boiling Point |
-85°C |
| Density |
1.5 kg/m³ |
| Vapour Pressure |
41.7 bar |
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