Nitrous Oxide Intergas International Gases and Chemicals Limited

Intergas Products > Semiconductor Gases > Nitrous Oxide

NITROUS OXIDE

N₂O
UN 1070

DESCRIPTION: Nitrous Oxide is a colourless, non-flammable, non-toxic gas with a slightly sweet taste and odour.

TYPICAL APPLICATIONS: Nitrous Oxide is used in combination with silane for chemical vapor deposition (CVD) of silicon nitride layers. Enhancing silane with high-purity Nitrous Oxide is essential to preventing degradation of the combined deposition gases. Nitrous Oxide is also used in rapid thermal processing to grow high quality gate oxides.

Order Nitrous Oxide: +44 (0) 1782 822061 or Contact Us.

View Material Safety Data Sheet (MSDS)

Grade Impurities	Electronic	VLSI	Sigma 3
(Liquid Phase)	99.998% (n4.8) (Mol. PPM)	99.999% (n5.0) (Mol. PPM)	99.9997% (n5.7) (Mol. PPM)
Nitrogen	< 10	< 5	< 2
Oxygen	< 2	< 2	< 0.4
THC	< 1	< 1	< 0.1
Carbon Dioxide	< 2	< 2	< 0.5
Moisture	< 3	< 3	< 1
Carbon Monoxide	< 1	< 1	< 0.1
Ammonia	< 5	< 5	< 1
Nitric Oxide	< 1	< 0.5	< 0.5
Nitrogen Dioxide	< 1	< 0.5	< 0.5
Halogens	--	< 0.5	< 0.5

Cylinder Size	Volume (kg)
B44st (A)	27.3
B50st	30

Cylinder Data

Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / volumes as listed -
smaller volumes are available on request.

INTERGAS can supply any internationally recognised valve type. For Nitrous Oxide the standard international valve types are as follows:
American	CGA 326 / DISS 712
European	DIN 477-6
Recommended Equipment
Single stage brass or stainless steel body with stainless steel internals. INTERGAS has a variety of suitable handling equipment for this product - please enquire.

Gas Data
Mol. Weight	44.01
Boiling Point	-84.4°C
Density	1.812 kg/m³
Vapour Pressure	52 bar