Phosphine Intergas International Gases and Chemicals Limited

Intergas Products > Semiconductor Gases > Phosphine

PHOSPHINE

PH₃
UN 2199

DESCRIPTION: Phosphine is a colourless, flammable, highly toxic gas with an odour of decaying fish.

TYPICAL APPLICATIONS: Phosphine is used in silicon processing as a phosphorus (N-type dopant) source in chemical vapor deposition (CVD) and ion implantation. Phosphine is also used in gallium arsenide as an ion implantation gas in the manufacture of light emitting diodes (LEDs).

Order Phosphine: +44 (0) 1782 822061 or Contact Us.

View Material Safety Data Sheet (MSDS)

Grade Impurities	VLSI 99.9998 (N5.8)
(Gas Phase)	(Vol. PPM)
Argon + Oxygen	< 1
Arsine	< 1
Methane	< 0.5
Carbon Monoxide	< 0.5
Carbon Dioxide	< 0.5
Moisture	< 1
Nitrogen	< 1

Cylinder Size	Volume (kg)
B44st (A)	12.3
B50st	13.9

Cylinder Data

Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / volumes as listed -
smaller volumes are available on request.

INTERGAS can supply any internationally recognised valve type. For Phosphine the standard international valve types are as follows:
American	CGA 350 / DISS 632
European	DIN 477-1
Recommended Equipment
INTERGAS recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details.

Gas Data
Mol. Weight	33.997
Boiling Point	-87.7°C
Density	1.40 g/cm³
Vapour Pressure	41.9 bar