Intergas International Gases and Chemicals Limited

Intergas Products > Semiconductor Gases > Sulphur Hexafluoride

UN 1080

DESCRIPTION: Sulphur Hexafluoride is a non-flammable, colourless, odourless gas.

TYPICAL APPLICATIONS: Sulfur Hexafluoride is used for plasma etching prior to chemical vapor deposition (CVD). Processes include oxide etching, nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which is itself inert, disassociates in the presence of an RF field to form reactive fluoride ions. The resulting highly reactive ions are excellent for etching tungsten and tungsten silicide films.

Order Sulphur Hexafluoride: +44 (0) 1782 822061 or Contact Us.
View Material Safety Data Sheet (MSDS)

MEGA Electronic
(Liquid Phase) 99.998% (N4.8)
(Mol. PPM)
99.999% (N5.0)
(Mol. PPM)
Nitrogen < 5 < 1
Oxygen < 5 < 0.5
Halocarbon 14 < 5 < 3
Moisture < 2 < 0.3
Hydrogen Flouride < 0.1 < 0.1


Cylinder Size Volume (kg)
B10st 10
B44st (A) 45.8
B50st 52
Cylinder Data
Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / volumes as listed -
larger volumes are available on request.


INTERGAS can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows:
American CGA 590 / DISS 716
European DIN 477-6
Recommended Equipment
Single stage brass or stainless steel body with stainless steel internals.
has a variety of suitable handling equipment for this product - please enquire.
Gas Data
Mol. Weight 146
Boiling Point -63.7°C
Density 0.736 kg/m³
Vapour Pressure 21 bar


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