Intergas International Gases and Chemicals Limited


Intergas Products > Semiconductor Gases > Silicon Tetrachloride

SILICON TETRACHLORIDE SiCl4
UN 1818

DESCRIPTION: At room temperature Silicon Tetrachloride is a colourless, non flammable, corrosive liquid.

TYPICAL APPLICATIONS: Silicon tetrachloride is used to plasma etch metals and in epitaxial silicon applications.

Order Silicon Tetrachloride: +44 (0) 1782 822061 or Contact Us.
View Material Safety Data Sheet (MSDS)

Grade
Impurities		 99.999% (N5.0)
(Liquid Phase) (Vol. PPM)
Donors (P, As, Sb) < 3 ppba
Boron < 0.1 ppba
Aluminium < 0.003 ppba
Hydrocarbons < 0.1 ppmw
Carbon < 0.3 ppma
Trichlorosilane < 100 ppmw

 

Cylinder Size Volume (kg)
B10st up to 12
B50st up to 60
Cylinder Data
Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / volumes as listed -
larger volumes are available on request.

 

INTERGAS can supply any internationally recognised valve type. For Tetrachloride the standard international valve types are as follows:
American CGA 330 / DISS 636
European DIN 477-8
Recommended Equipment
INTERGAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Gas Data
Atomic Weight 169.9
Boiling Point 57.6°C
Density 1.483 kg/cm³
Vapour Pressure 0.2 bar
   
   

 

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