Intergas Products > Semiconductor Gases > Silane
SILANE |
SiH4
UN 2203 |
DESCRIPTION: Silane is a colourless gas with a repulsive odour at room temperature and atmospheric pressure. In its pure state it is spontaneously combustible in air but is indefinitely stable in metal containers.
Metals analysis data is available on request.
TYPICAL APPLICATIONS:
Silane is used as a silicon precursor in the chemical vapor deposition (CVD) of silicon dioxide, silicon nitride, polysilicon, epitaxial silicon and amorphous silicon films. |
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