Intergas Products > Semiconductor Gases > Ammonia
AMMONIA
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NH3
UN 1005 |
DESCRIPTION: Ammonia(NH3) is a colourless, alkaline gas with a pungent odour.
TYPICAL APPLICATIONS:
Ammonia is used as a reactant gas in the deposition of silicon nitride layers. Ammonia is often used in conjunction with dichlorosilane or silane. |
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