Intergas International Gases and Chemicals Limited


Intergas Products > Semiconductor Gases > Boron Trichloride

BORON TRICHLORIDE
    (Boron Chloride)		 BCl3
UN 1741

DESCRIPTION: Boron Trichloride(BCl3) is a colourless gas, which fumes in the presence of moist air. It has a choking odour.

TYPICAL APPLICATIONS: Boron Trichloride is the preferred gas for plasma etching of aluminum alloys, tungsten and tungsten silicide.

Order Boron Trichloride: +44 (0) 1782 822061 or Contact Us.
View Material Safety Data Sheet (MSDS)

Grade Impurities 99.99% (n4.0) 99.999% (n5.0)
(Liquid Phase) (Vol. PPM) (Vol. PPM)
Nitrogen < 40 < 2
Oxygen < 20 < 1
Carbon Monoxide < 20 < 0.2
Carbon Dioxide -- < 0.2
Chlorine < 5 < 0.2
Phosgene < 5 < 0.5
Hydrogen Chloride -- < 1
Methane -- < 0.5

Metals Analysis N5.0 Grade only
Impurity Intergas Spec. Impurity Intergas Spec.
(PPM wt) (PPM wt)
Ag 0.1 Cu 0.01
Al 0.05 Fe 0.1
As 0.03 K 0.05
Ba 0.01 Li 0.01
Bi 0.01 Mg 0.02
Ca 0.02 Mn 0.01
Cd 0.01 Na 0.1
Co 0.01 Ni 0.01
Cr 0.02 Pb 0.01
Sb 0.01 Si 0.5
Zn 0.05 -- --

 

 

Cylinder Size Volume (Kg)
B10st 12
B44st (A) 50
B50st 60
Cylinder Data
Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / volumes as listed -
larger volumes are available on request.

 

INTERGAS can supply any internationally recognised valve type. For Boron Trichloride the standard international valve types are as follows:
American CGA 660 / DISS 634
European DIN 477-8
Recommended Equipment
INTERGAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Gas Data
Mol. Weight 117.17
Boiling Point 12.4°C
Density 1.37 g/cm³
Vapour Pressure 1.07 bar
   
   

 

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