Chlorine Intergas International Gases and Chemicals Limited

Intergas Products > Semiconductor Gases > Chlorine

CHLORINE

Cl₂
UN 1962

DESCRIPTION: Liquid chlorine is a clear amber-coloured liquid and gaseous chlorine is a greenish yellow. It has a suffocating odour and irritates both the nose and throat.

TYPICAL APPLICATIONS: Chlorine is used with boron trichloride or silicon tetrachloride to enhance etching characteristics of aluminum etching. Chlorine is also used with sulfur hexafluoride for etching titanium tungsten structures and is combined with hydrogen bromide or hydrogen chloride to etch polysilicon.

Order Chlorine: +44 (0) 1782 822061 or Contact Us.

View Material Safety Data Sheet (MSDS)

Grade Impurities	Electronic	VLSI	Sigma 3
(Liquid Phase)	99.97% (n3.7) (Mol. PPM)	99.997% (n4.7) (Mol. PPM)	99.999% (n5.0) (Mol. PPM)
Nitrogen	< 100	< 10	< 2
Oxygen	< 10	< 2	< 1
THC	< 5	< 0.2	< 1
Carbon Dioxide	< 200	< 7	< 5
Moisture	< 5	< 3	< 1
Carbon Monoxide	--	--	< 1
Iron (Fe)	--	--	< 0.5 ppmw
¹Other metals include: Ca, Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn

Cylinder Size	Volume (Kg)
B44st (A)	45.5
B50st	51.7

Cylinder Data

Supplied as a liquefied gas under its own vapour pressure in steel cylinders.
Standard sizes / volumes as listed -
smaller volumes are available on request.

INTERGAS can supply any internationally recognised valve type. For Chlorine the standard international valve types are as follows:
American	CGA 660 / DISS 728
European	DIN 477-8
Recommended Equipment
INTERGAS recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details.

Gas Data
Mol. Weight	70.906
Boiling Point	-34.05°C
Density	2.980 kg/m³
Vapour Pressure	5.8 bar