Intergas International Gases and Chemicals Limited


Intergas Products > Semiconductor Gases > Carbon Monoxide

CARBON MONOXIDE CO
UN 1016

DESCRIPTION: Carbon Monoxide is a toxic, flammable, colourless, and odourless gas. It is slightly lighter than air.

TYPICAL APPLICATIONS: Carbon Monoxide is used as an additive for selective etching of oxide films that are deposited over silicon nitride.

Order Carbon Monoxide: +44 (0) 1782 822061 or Contact Us.
View Material Safety Data Sheet (MSDS)

Grade Impurities 99.997% (N4.7)
 99.999% (N5.0)
(Gas Phase) (Vol. PPM) (Vol. PPM)
Carbon Dioxide < 2 < 1
THC < 1 < 0.5
Moisture < 1 < 2
Nitrogen < 20 < 1
Hydrogen < 3 < 1
Oxygen < 1 < 0.5
Argon < 2 < 7

 

Cylinder Size Volume (M³) Pressure (Bar)
B50al 9.6 200
Cylinder Data
Supplied as a high pressure gas in aluminium cylinders.
Standard sizes / volumes as listed -
smaller volumes available on request.

 

INTERGAS can supply any internationally recognised valve type. For Carbon Monoxide the standard international valve types are as follows:
American CGA 350 / DISS 724
British BS 341-4
European DIN 477-5
Recommended Regulator
Two stage brass or stainless steel body with stainless steel internals.
INTERGAS has a variety of suitable handling equipment for this product - please enquire.
Gas Data
Mol. Weight 28.0104
Boiling Point -191.5°C
Density 1.25 kg/m³
   
   
   

 

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