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Intergas Products > Semiconductor Gases > Hydrogen Bromide
 HYDROGEN BROMIDE
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HBr
UN 1048 |
DESCRIPTION: Hydrogen Bromide is a colourless, toxic and corrosive gas at atmospheric pressure and room temperature. It is heavier than air, and fumes in moist air.
TYPICAL APPLICATIONS:
Hydrogen Bromide is used in combination with hydrogen chloride and chlorine for plasma etching of polysilicon. |
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Grade
Impurities |
Electronic
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VLSI |
Sigma 3 |
| (Liquid) |
99.95% (n3.5)
(Mol. PPM) |
99.995% (n4.5)
(Mol. PPM) |
99.9995% (n5.5)
(Mol. PPM) |
| Nitrogen |
< 320 |
< 13 |
< 2 |
| Oxygen |
< 80 |
< 6 |
< 1 |
| THC |
-- |
< 5 |
< 1 |
| Carbon Dioxide |
< 10 |
< 8 |
< 3 |
| Moisture |
< 5 |
< 3 |
< 1 |
| Carbon Monoxide |
< 10 |
< 2 |
< 1 |
| Total Metals |
-- |
< 10ppmw |
< 0.5 ppmw |
| Iron (Fe) |
-- |
< 10ppmw |
< 0.1 ppmw |
| Nickel (Ni) |
-- |
-- |
< 0.05 ppmw |
| Chromium (Cr) |
-- |
-- |
< 0.05 ppmw |
| Other Metals ¹ |
-- |
-- |
< 0.01 ppmw |
| ¹Other metals, include: Ca, Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn |
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| Cylinder Size |
Volume (kg) |
| B44st (A) |
45.5 |
| B50st |
51.7 |
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| INTERGAS can supply any internationally recognised valve type. For Hydrogen Bromide the standard international valve types are as follows: |
| American |
CGA 330 / DISS 634 |
| European |
DIN 477-8 |
| Recommended Equipment |
INTERGAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details. |
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| Gas Data |
| Mol. Weight |
80.921 |
| Boiling Point |
66.7°C |
| Density |
3.330 kg/m³ |
| Vapour Pressure |
22.6 bar |
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